Photonics Research Group Home
Ghent University Journals/Proceedings
About People Research Publications Education Services
 IMEC
intern

 

Publication detail

Authors: J. Schrauwen, J. Van Lysebettens, T. Claes, K. De Vos, P. Bienstman, D. Van Thourhout, R. Baets
Title: Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators
Format: International Journal
Publication date: 12/2008
Journal/Conference/Book: IEEE Photonics Technology Letters
Volume(Issue): 20(23) p.2004
DOI: 10.1109/lpt.2008.2006001
Citations: 21 (Dimensions.ai - last update: 29/9/2024)
16 (OpenCitations - last update: 3/5/2024)
Look up on Google Scholar
Download: Download this Publication (470KB) (470KB)

Abstract

We present the focused-ion-beam fabrication of slots in existing silicon waveguides and racetrack resonators. The etch process was conducted with iodine enhancement and an alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 $mu {hbox{m}}$.

Related Research Topics

Related Projects

Citations (OpenCitations)

Back to publication list