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Authors: S. Selvaraja, M.Schaekers, W. Bogaerts, D. Van Thourhout, R. Baets
Title: Polycrystalline silicon as waveguide material for advanced photonic
Format: International Conference Proceedings
Publication date: 5/2007
Journal/Conference/Book: 11th IEEE/LEOS Benelux Annual Workshop 2007
Location: Eindhoven, Netherlands
Internal Reference: [N-607]
Download: Download this Publication (43KB) (43KB)

Abstract

We report single mode polycrystalline-silicon on insulator photonic wire fabricated in a CMOS fabrication facility. The optical quality and the material aspects of the polycrystalline-silicon for photonic application were studies. We report an optical propagation loss of 13.4dB/cm which is the lowest loss reported for a 500nm wide photonic wire.

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