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Authors: J. Schrauwen, F. Van Laere, D. Van Thourhout, R. Baets
Title: Focused-ion-beam fabrication of slanted fiber couplers in silicon-on-insulator waveguides
Format: International Conference Presentation
Publication date: 4/2007
Journal/Conference/Book: ECIO 2007
Location: Copenhagen, Denmark
Internal Reference: [N-594]
Download: Download this Publication (310KB) (310KB)

Abstract

We have designed and fabricated an efficient grating coupler for silicon-on-insulator waveguides. The coupler consists of 88nm wide slits, under an angle of 58° to the surface normal. They are defined by direct etching with a focused ion beam, using iodine gas and an alumina hard mask. The measured efficiency was 46%.

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